Learn how other material science researchers in APAC are using GeminiSEM

Research innovators in electron microscopy series

ZEISS is celebrating 30 years of GeminiSEM!

  • Read about experiences & insights from your peers across the region!
  • Interviews from researchers from China, Korea, Taiwan & India!

Learn about ZEISS GeminiSEM's low kV imaging technology

& how it can help your research

Achieve true surface imaging of your samples at ultra-low kV

Learn how non-conductive samples such as mesoporous silica, SiC fibers & CNTs can achieve high resolution of highly magnified images. The samples were imaged between 0.5 to 1 kV without surface coating or stage biasing.

See how other researchers are using ZEISS GeminiSEM In the Asia Pacific region

Innovators with different backgrounds from China, Korea, India & Taiwan discuss how their users and their organization have benefitted from owning a ZEISS field-emission scanning electron microscope.

Dr. Mario Hentschel​
CHINA Dr. Gong Ming Deputy director, Lab of mechanical & materials science, University of science & technology, China

Dr. Gong Ming is using ZEISS GeminiSEM to serve more than 50 major projects of the National Natural Science Foundation, National Outstanding Youth Science Fund projects, National Key research and development programs.

SOUTH KOREA Dr. Keyongsu Jeon Senior Researcher Daegu Technopark, Technical Infrastructure Support Division Nanotechnology Processing Center, Korea

Dr. Keyongsu Jeon is currently researching various types of samples, such as nano-materials/components, ceramics, metals, polymers, bio or semiconductors, from diverse customers (both industries and academics).

SOUTH KOREA Dr. Jae Kim Senior Researcher Ulsan Technopark, Fine Chemical & Material Technology Support Division, Korea

Dr. Jae Kim is currently researching the characterization of materials using scanning electron microscopy. He is particularly focused on the imaging of 3D printing-related polymeric materials, metal powders, and composites.

TAIWAN Dr. Liuwen Chang Professor, Department of Materials and Optoelectronic Science, National Sun Yat-sen University, Taiwan

Dr. Chang, who researches electro-epitaxy of metals and compound semiconductors, uses SEM-based techniques such as EBSD, ECP, and ECCI to provide microstructural information of the epilayers in a non-destructive manner.

INDIA Dr. Satyam Suwas Professor & Chair, Department of Materials Engineering, IISC, Bangalore

Dr. Satyam Suawas is currently researching deformed and annealed metals and alloys.

INDIA Dr. Savitha Purakkat National Nanofabrication Centre, Centre for Nanoscience and Engineering, Indian Institute of Science, India

Dr. Savitha is currently researching dielectric film like, Al2O3, sub 50nm feature imaging.

INDIA Dr. Ruma Ghosh Assistant Professor, E&ECE Department, IIT Dharwad, India

Dr. Ruma is researching the morphologies, surface compositions, and dimensional analyses of nanomaterials, thin films, metal and ceramic composites, and microbial cells.

See how other researchers are using ZEISS GeminiSEM In the Asia Pacific region

Innovators with different backgrounds from China, Korea, India, Taiwan, Japan & SEA discuss how their users and their organization have benefitted from owning a ZEISS field-emission scanning electron microscope.

Dr. Gong Ming

Deputy director, Lab of mechanical & materials science, University of science & technology, China

Dr. Gong Ming is using ZEISS GeminiSEM to serve more than 50 major projects of the National Natural Science Foundation, National Outstanding Youth Science Fund projects, National Key research and development programs. 

Dr. Keyongsu Jeon

Senior Researcher Daegu Technopark, Technical Infrastructure Support Division Nanotechnology Processing Center, Korea

Dr. Keyongsu Jeon is currently researching various types of samples, such as nano-materials/components, ceramics, metals, polymers, bio or semiconductors, from diverse customers (both industries and academics).

Dr. Jae Kim

Senior Researcher Ulsan Technopark, Fine Chemical & Material Technology Support Division, Korea

Dr. Jae Kim is currently researching the characterization of materials using scanning electron microscopy. He is particularly focused on the imaging of 3D printing-related polymeric materials, metal powders, and composites.

Dr. Liuwen Chang

Professor, Department of Materials and Optoelectronic Science, National Sun Yat-sen University, Taiwan

Dr. Chang, who researches electro-epitaxy of metals and compound semiconductors, uses SEM-based techniques such as EBSD, ECP, and ECCI to provide microstructural information of the epilayers in a non-destructive manner.

Dr. Ruma Ghosh

Assistant Professor, E&ECE Department, IIT Dharwad, India

Dr. Ruma is researching the morphologies, surface compositions, and dimensional analyses of nanomaterials, thin films, metal and ceramic composites, and microbial cells.

Dr. Savitha Purakkat

National Nanofabrication Centre, Centre for Nanoscience and Engineering, Indian Institute of Science, India

Dr. Savitha is currently researching dielectric film like, Al2O3, sub 50nm feature imaging.

Dr. Satyam Suwas

Professor & Chair, Department of Materials Engineering, IISC, Bangalore

Dr. Satyam Suawas is currently researching deformed and annealed metals and alloys.

  • "A flower is a world, a leaf is a bodhi."

    The sample is a Co3O4 nanowire structure grown on a nickel foam matrix, in which some of the nanowires are clustered together to form a nanosheet petal structure.

  • 梯田叠叠绕云开,白水一泓天上来

    The sample is nickel foam, and the Inlens detector can clearly observe the small black spots formed by the carbonization of glucose on the surface.

  • FezMnyCozCryNiyGdx alloy Bauschinger effect research. The area indicated by the red arrow indicates that the HCP phase can be fully recovered, the area indicated by the yellow arrow indicates that the HCP phase cannot be fully recovered, and the area indicated by the white arrow indicates the new HCP phase.

Dr. Gong Ming

Deputy director, Lab of mechanical & materials science, University of science & technology, China

How does ZEISS SEM help you in your work and research?

The ZEISS GeminiSEM 500 SEM has been in use for more than 6 years. As an important tool for material science research, it is one of the most frequently used large-scale equipment in our center, serving more than 2000 hours for teachers and students inside and outside the school every year. The ZEISS GeminiSEM 500 SEM provides a large amount of indispensable technical support for many research groups at the university, including the academician research group. For example, in 2022, it has served more than 50 major projects of the National Natural Science Foundation, National Outstanding Youth Science Fund projects, National Key research and development programs, and key research and development programs of the Ministry of Science and Technology, supported more than 200 SCI scientific research papers, and more than 60 EI and CSCD papers. In addition, according to the national sharing service requirements for large scientific instruments and equipment, it also provides high-resolution SEM testing needs for universities, research institutes and high-tech enterprises in the surrounding areas.

On the other hand, we are the first in the country to offer electron microscopy experimental training courses for graduate students to cultivate their hands-on ability and the ability to independently operate large equipment to solve scientific research problems, so that students can be in line with international standards. Students who complete the course can get the corresponding credits and also be awarded the computer operation certificate. After they arrive at the institute of the Chinese Academy of Sciences, with this certificate, they have the qualification to independently operate scanning electron microscopy in subsequent scientific research work. This makes our courses very popular! Some graduate students used the results of our electron microscopy to participate in the national innovation and entrepreneurship competition, as well as photomicrography competition and so on, and have obtained good results.

What do you like best about ZEISS Electron Microscopy?

I think the design of ZEISS Gemini is a revolution in electron microscopy technology. In traditional SEM, the electron beam needs to be converged several times in the tube and then focused on the surface of the sample for scanning imaging. The ZEISS Gemini tube's parallel electron beam technology is a subversion of traditional cognition, and it has proved to be very successful, providing excellent resolution while maintaining beam flow. After the launch of Gemini technology, we as customers have gone from novelty to recognition, to now familiarity. After your patent expires at the end of 20 years, you will see that other manufacturers are going to follow suit, which will further reflect the leadership of ZEISS Gemini technology. In addition to the advantages of the electron tube, ZEISS SEM also has a large sample chamber and a relatively large number of flange interfaces, which provides customers with a lot of possibilities for later functional expansion and development. Not only can we flexibly carry some third-party accessories in the electron microscope, such as energy spectrum and EBSD on our ZEISS Gemini500 SEM, but also can be used in the electron microscope. On this basis, the extension devices such as in situ stretching and heating table can also be developed, so that the in-situ mechanics and in-situ EBSD experiments are very convenient and safe.

What suggestions do you have for ZEISS services?

ZEISS Has a lot of cutting-edge scientific research equipment and has achieved very good results in China over the years, which is inseparable from the starting point of ZEISS's focus on helping customers solve scientific problems. ZEISS Has Excellent Core Technology, the quality of equipment is reliable, and good technical service. Our ZEISS G500 SEM has been installed for more than 6 years and has been running very stable. Moreover, ZEISS Has Local Application Engineers and after-sales engineers in Hefei, which are very timely in terms of after-sales response and maintenance. Your meticulous care for customers has not only made us happy, but also benefited the customers in the whole Hefei area. I hope that in the future ZEISS Will Organize Some Meetings to increase the communication and interaction between ZEISS and its users, as well as between us and other ZEISS electron microscopy users.

 

  • PCB board & Solar panel cross-section​

  • Secondary battery anode​

  • Nano probe & EBIC

Dr. Keyongsu Jeon

Senior Researcher Daegu Technopark, Technical Infrastructure Support Division Nanotechnology Processing Center, Korea

What research are you currently doing & what imaging challenges were you facing?

As you might know, Daegu Technopark is a corporate support institute for technological innovation and development for regional companies, and provides corporate support projects for prototypes, start-up products, R&D, and defect analysis using electron microscopy.

We normally deal with various types of samples, such as nanomaterials/components, ceramics, metals, polymers, bio, or semiconductors, from diverse customers (both industries and academics). So there were some difficulties in imaging or measurement methods and preparation work when it comes to unfamiliar samples.

How did the ZEISS GeminiSEM column help you solve those challenges?

The biggest pain point came out when we encountered unfamiliar samples was preparation. There are multiple ways of sample preparation. For example, we used to cut the sample for surface observation, and cutting creates chafing, so the preparation is important. There was a case where preparation took half a day, while imaging itself only took 30 minutes.

The ZEISS GeminiSEM column shows great results in low kV, so it helped a lot with non-coating samples or polymers, etc. Especially, there was a company related to permanent magnets which are used for electric vehicle motors. Before we used the ZEISS GeminiSEM column, we needed to demagnetize before imaging, but now the system removed this preparation step. And the capability of BSE and Inlens detector is superior to other systems, so we always use the ZEISS GeminiSEM column when measuring metal samples.

How do you use the ZEISS GeminiSEM column in your work?

The biggest progress with the ZEISS GeminiSEM column in my center is regarding the use of probe. While the semiconductor samples were getting spotlighted, it was not easy to image as semiconductor wafers have low conductivity and contact points are small and difficult to find.

We used to measure the resistance of them by hand, but it led to errors because of the vibration and became more impossible as samples got smaller and smaller. So we started to use probe, which is based on non-coating samples. From the beginning, charging caused some troubles, but soon the performance of the ZEISS GeminiSEM column at low kV supported our research a lot. In addition, we can apply a voltage by touching the probe to the sample, and pass electricity through the semiconductor circuit to image what's on the surface or inside.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

At the time of transformation from resistive to capacitive type in Touch Panel Screen, ITO (Indium Tin Oxide) was the biggest challenge. We went through several experiments, but it showed different resistances even under the same condition. Before using the ZEISS GeminiSEM column, the capability was only to check the grain size, and the heating process for BSE changed the crystals, making fine-imaging difficult. At last, with low kV imaging by ZEISS GeminiSEM Inlens detector, we were able to capture the real image of ITO crystals.

And when we were doing a research on secondary battery anode material, from cross-section imaging, we acquired the crystal grain structure and element distribution using BSE. Customers were very satisfied with our results, and the range of application field was expanded from raw/finished materials to defects analysis. Most of our cases are ceramics, metals (crystals, composites, etc.), and defect analysis (foreign matter identification), and BSE helps to see the contrast easily.

If someone is considering the Gemini-column now, what would you tell them?

Based on my experience, the ZEISS GeminiSEM column has shown excellent performances with low kV, magnetic samples, and BSE detector. Depending on your primary sample, you might have different needs, but I believe you can get the results you want with excellent contrast and high resolution images in a wide range of applications. Especially in BSE, the ZEISS GeminiSEM will create crisper and cleaner images than other systems!

  • 3D Printing medical material tensile experiment & analysis

  • 3D Printing medical material tensile experiment & analysis

Dr. Jae Kim

Senior Researcher Ulsan Technopark, Fine Chemical & Material Technology Support Division, Korea

What research are you currently doing & what imaging challenges were you facing?

My main responsibilities at the 3D Printing Quality Evaluation Center are 3D-related R&D, analysis and evaluation of materials and outputs, and technical support for small and medium-sized enterprises. Before using the ZEISS GeminiSEM, in order to observe samples with high resolution, we had to apply high voltage to image them, which caused damage like burning on the surface of polymer specimens. Furthermore, in the case of non-conductive materials like porous materials or ceramics, surface charging problems occurred, so it was difficult to acquire a good quality image.

How did the ZEISS GeminiSEM column help you solve those challenges?

To reduce charging problems, we used to put a coating on samples. We spent more than 15 minutes for preparation when we tested non-conductive porous ceramics. Even this method could only be used for surface analysis, not for structure analysis. These days, more cases with non-conductive samples in complex structures occur, and more severe charging issues occur. However, as the ZEISS GeminiSEM column enables high resolution in low kV, analysis of samples that are sensitive to the electron beam became easy, and it is really useful when we analyze a magnetic sample.

How do you use the ZEISS GeminiSEM column in your work?

I use it to image 3D printing-related polymeric materials, metal powders, or composites. In the case of metal powders like STS316L, 17-4PH, or Inconel718, etc., I was able to analyze powder morphology, sphericity, particle size distribution, density, and flow diagrams with the ZEISS GeminiSEM. This helped the R&D of magnetic cores, such as amorphous or ferrite, automotive/medical/military components, and electronic devices like mobile phones.

With medical materials, like PE, PS, TPU, or polyurethane thermoplastics, etc., I went through mechanical and thermal characterization and density analysis. Dental prosthetics, medical orthopaedics, and manufacturing for heat-resistant high-elongation parts benefited from the analysis. For household/industrial composites and outputs used for unstructured PC framework or pressed molds, I performed additive analysis, dissimilar material adhesion analysis, thermal stability, and impact strength analysis.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

The ZEISS GeminiSEM column enables me to observe the interfaces between the continuous yarn fibers and the base material, and it gives us a major contribution to the research on optimizing composite output conditions. In the 3D printing process using spherical powders, voids inevitably came out, and we tried to fill them with carbon fibers. We needed to know how much the gap was between the dissimilar materials, or observe the cross-section by breaking/cutting them with a knife. The capability of the ZEISS GeminiSEM column at low kV helped us a lot at this point.

Also, the ZEISS GeminiSEM column is very useful when it comes to imaging defects on the surface of powder generated from atomizing. Powder needs to be the most stable spherical for successful 3D printing. The ZEISS GeminiSEM shows images with more accurate particle distribution and size, compared to infrared diffraction methods which we used before. We also used Confomap, an image analysis program, to process the ZEISS GeminiSEM images.

If someone is considering the ZEISS GeminiSEM column now, what would you tell them?

I can pick two points for the reason why I recommend the ZEISS GeminiSEM column.

First, the ZEISS GeminiSEM column has versatility that enables it to image a wide range of materials, and this leads to various adaptations of the ZEISS GeminiSEM column to diverse research and analysis. In addition, you can acquire high-quality images faster than the other systems, increasing your research efficiency!

  • An electron channeling contrast image shows threading dislocations in a (0001) GaN epilayer. A few dislocations have their line direction being inclined or nearly parallel to the epilayer surface, rather than threading down directly. (Scale bar: 200 nm)

  • An in-lens secondary electron image (SEI) of electrodeposited Cu2O pyramids situated on an epilayer shows that Cu nanoparticles are distributed on both the pyramid and epilayer surfaces. The high–magnitude in-lens SEI in the inset reveals that dense pits of less than 10 nm in size are observed on the Cu2O surface. (Scale bar: 100 nm)

  • An in-lens secondary electron image of a Ni (100) epilayer grown on a Cu (100) substrate by electrodeposition. The cross-hatched marks are along two <110> directions. (Scale bar: 500 nm)

Dr. Liuwen Chang

Professor, Department of Materials and Optoelectronic Science, National Sun Yat-sen University, Taiwan

I graduated from National Tsing Hua University in 1983, and received an MS from NSYSU in 1985 and a Ph.D. from Michigan State University in 1993, both in Materials Science. In my early research career, I mainly utilized transmission electron microscopy to characterize microstructures of metals and semiconductors. In 1996, I worked at China Steel Corporation at the moment, and Professor Po-We Kao and Professor Chih-Pu Chang at NSYSU introduced the first two EBSD systems to Taiwan concurrently. Since then, characterization techniques based on scanning electron microscopes such as EBSD and CL have played an increasingly important role in my research.

What research are you currently doing and what imaging challenges were you facing?

Currently, my major research interest is in electro-epitaxy of metals and compound semiconductors. By employing a combinatorial substrate approach, polycrystalline, instead of single-crystal, substrates are used in epitaxial growth. Under this circumstance, I heavily rely on SEM-based techniques such as EBSD, ECP, and ECCI to provide microstructural information of the epilayers in a non-destructive manner.

How did the ZEISS GeminiSEM column help you solve those challenges?

The ZEISS GeminiSEM column provides very good resolution at low kVs, which allows surface details of the epitaxial films to be inspected and observed. Moreover, the high-current electron beam at high energy allows electron channeling contrast images to be acquired easily for exploring the defects in the epilayers.

How do you use the ZEISS GeminiSEM column in your work?

The ZEISS GeminiSEM column was used to acquire high-quality in-lens, SE, and BSD images as well as conduct EDS and EBSD analyses.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

The ZEISS GeminiSEM column has helped us to acquire high-quality images for clarifying the following problems:

1. The growth mode of Ni, Co, and Zn epilayers in electrodeposition.

2. The early nucleation mechanism and subsequent growth mode of Cu2O and ZnO in electrochemical deposition.

3. The nano-twinned Ni structure obtained in electrodeposition.

4. The threading dislocations in various semiconductor epilayers.

If someone is considering the Gemini-column now, what suggestion would you give them?

The ZEISS SEM equipped with a Gemini-column is an easy-to-use and stable equipment that provides various types of images with high resolution and high contrast. However, users are obligated to have a deep understanding of the pros and cons of each imaging mode to choose the most appropriate imaging option for characterization.

  • (a) ZnO nanoflakes (d) Mapped EDS spectra showing the purity of the synthesized ZnO (c) reduced graphene oxide – tetrazine polymer (PhPTz) composite (d) Mo2C nanoflakes

Dr. Ruma Ghosh

Assistant Professor, E&ECE Department, IIT Dharwad, India

What research are you currently doing and what imaging challenges were you facing?

The users of the Carl ZEISS GeminiSEM 300 are involved in research related to nanomaterials, thin films, metal and ceramic composites, microbial cells, etc. The morphologies, surface compositions, and dimensional analyses of samples are routinely required at our institute.

How did the ZEISS GeminiSEM column help you solve those challenges?

We are using the secondary electron imaging and energy dispersive spectroscopy (EDS) attached with the ZEISS GeminiSEM column extensively. In addition, we also use the backscattered electron detector (BSD) provided to us by ZEISS sometimes for the compositional analysis of the nanomaterial surfaces.

How do you use the ZEISS GeminiSEM column in your work?

My research group works on developing various types of sensors using different nanostructures. So, we use the ZEISS GeminiSEM 300 for the morphological and elemental composition studies of our samples. In addition, we develop immunosensors, which require proper and site-specific binding of antibodies on the graphene nanosheets. We use the ZEISS GeminiSEM to ascertain the same.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

We are able to achieve high-quality secondary electron images and EDS spectra with the ZEISS GeminiSEM column.

If someone is considering the ZEISS GeminiSEM column now, what would you tell them?

It is one of the present state-of-the-art systems of field-emission scanning electron microscopy (FESEM). Different types of signals are generated when an energetic electron beam interacts with a sample. It is a matter of availability of detectors with the ZEISS GeminiSEM column that one can capture various types of information about the samples. The ZEISS systems give you many detector ports and hence a good flexibility in terms of providing solutions to one's challenges. Also, the technical and service teams are quite supportive and prompt in offering help and solutions.

  • Conformal Deposition using Sputter on AZ5214E resist profile of 2µ feature size.

  • imaging at low EHT

  • imaging at low EHT

  • imaging at low EHT

  • SiNW grown using VLS method

Dr. Savitha

National Nanofabrication Centre, Centre for Nanoscience and Engineering, Indian Institute of Science

What research are you currently doing and what imaging challenges were you facing?

I am currently researching the imaging of dielectric films, such as Al2O3, with features smaller than 50 nm.

How did the ZEISS GeminiSEM column help you solve those challenges?

The ZEISS GeminiSEM column has very precise contrast and stigmation control, which has helped me image features smaller than 50 nm and dielectric samples with better precision. Additionally, the beam blanker in the ZEISS GeminiSEM column helps me avoid unnecessary exposure of the sample under investigation.

How do you use the ZEISS GeminiSEM column in your work?

Currently, I am using the column for low kV imaging.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

The ZEISS GeminiSEM column has helped me get sharper and clearer images, which allows me to investigate patterned samples more effectively. The cross-sectional images obtained with the ZEISS GeminiSEM column at both high and low kV are clear and provide a better picture of the process performed.

If someone is considering the ZEISS GeminiSEM column now, what would you tell them?

I would recommend the ZEISS GeminiSEM column as it helps in obtaining critical images with good precision.

Dr. Satyam Suwas

Professor & Chair, Department of Materials Engineering, IISC, Bangalore

What research are you currently doing and what imaging challenges were you facing?

Currently, we are working on the microstructural study of deformed and annealed metals and alloys. This basically involves using newer and conventional alloys, both of which we subject to deformation processing to give them different shapes. For all my future endeavors, the support of ZEISS is highly crucial because I have to see the structure of metals through microscopes. The better the microscopes are, the more durable they are, and that will help me in my research. I want a long-term association with ZEISS in all of its microstructural products. I was familiar with older versions of the microscope, but the latest version was introduced through this virtual platform, and in that, the people from ZEISS have really helped.

Because ZEISS microscopes are robust microscopes, our experiments require longer-term exposure and longer-term scanning of samples, which requires beam stability over a longer period of time. And in my personal experience, ZEISS microscopes are best suited for this. Moreover, it is also important to have very good service. Support equipment is procured for constant or long-term planned experiments. So, that has to be done without interruption, and that cannot happen without the support for the microscope from the technical staff.

How do you use the ZEISS GeminiSEM column in your work?

I am Soumita Mondal, working with Professor Satyam Suwas at IISc Bangalore in the Department of Materials Engineering. My work primarily focuses on severe plastic deformation of cubic materials. I mostly do this deformation by high pressure torsion. One thing the ZEISS instrument has done in my research is that it has made my research pace up a lot faster. Previously, what I would have to do is, since it is a bulk nanocrystalline structure in my material, I would have to make TEM specimens, which itself is very time-consuming, both by focused ion beam milling or by thin sample foil samples. But with the ZEISS GeminiSEM system, I can go up to very high resolution in electron backscattered diffraction mode itself.

So, one very good thing done by the SEM is that now my research is going much faster.

I am Tejnath Reddy, a third-year PhD student working under Professor Satyam Suwas in the Materials Engineering Department at the Indian Institute of Science, Bangalore. Since my research work involves the study of 3D microstructure, I need to do a lot of EBSD scans after serial sectioning. I used to do my EBSD scans on a different microscope, where the capturing speed and the EBSD scan time were very huge, and it was not practical for me to do large numbers of scans with a larger area and smaller strip size.

The ZEISS GeminiSEM microscope really helped me a lot to do faster scans at a smaller strip size. Another aspect which I would like to add is the versatility of the ZEISS GeminiSEM microscope is that it has the capability of imaging EBSD and along with that, electron channeling contrast microscopy.

 

Click on the circle markers on the image to open the information box with more details.

Discover the technology behind Gemini Optics

Filter Grid Energy filter for the SEM

The grid voltage can select secondary or backscatter electrons for detection.

Condenser Electromagnetic lens

This lens is defining beam current and spot size with optimized aperture angles.

Inlens EsB detector Energy selective Backscatter detector

The EsB detector enables material contrast detector even at lowest voltages; a filter grid allows for the discrimination of backscattered electrons according to their energy.

Beam Booster In-column beam deceleration

The beam booster is an integrated beam deceleration that guarantees small probe sizes and high signal-to-noise ratios. The booster-potential boosts the beam through the column at high kV benefiting from reduced aberrations and protection from external stray fields and decelerates it at the pole piece enabling best image quality even at low kV.

FE-gun Electron source

Thermal field emission gun with a small tip, for small spot sizes

Inlens SE Detector Highly efficient in-column detection

Secondary electrons are collected from the sample surface for ultra high resolution, surface sensitivity and unique contrast.

Gemini Objective Electron probe forming lens

The objective lens is focusing the probe on the sample.

Magnetic Lens Electron lens incl. polepiece and coils

Together with the electrostatic lens (Gemini objective) electrons are focused to deliver ultra high resolution.

Sample Sample mounted on holder

From nanoparticles to large machine parts, SEM investigation is possible with very little sample preparation.

Electrostatic Lens Electron lens

Together with the magnetic lens (Gemini objective) electrons are focused to deliver ultra high resolution.

Scan Coils Scanning the beam over the sample (“raster” principle)

The electron beam is scanned and the signal detection is sychronized and forms the image.

  • Gemini Optics technology breakthrough

    over the years

    ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. These FE-SEMs (field emission scanning electron microscope) combine excellence in imaging and analytics. Innovations in electron optics and a new chamber design let you benefit from better image quality, usability and flexibility. Take sub-nanometer images below 1 kV without an immersion lens. Discover how Gemini optics has improved and evolved over time.

  • 1993
    1993

    Gemini 1 |
    First FESEM With GEMINI Optics​

    The combination of magnetic and electrostatic lens (Gemini optic lens) opens access to the world of low kV imaging. Photoresist and ceramic samples can be imaged uncoated without charging effects at high resolution with the DSM 982 Gemini.

  • 2003
    2003

    First Backscatter Detection (BSD)
    at Low kV

    The EsB detector is enabling  in-column backscatter detection for the first time. The unique energy filtering properties are used to enhance the material contrast. Even nanocomposites  can be analyzed with good material contrast with a small interaction volume.
    Conventional diode detectors were not able to work below 5 kV, but the in-column EsB can provide this.

  • 2004
    2004

    Introduction of Sweet Spot Imaging

    Cazaux and Grillon are publishing results showing the influence of the working distance for selective contrast imaging with the Gemini objective lens. ​
    Sweet spot imaging means systematically varying the SEM accelerating voltage and working distance for optimum image quality.

  • 2009
    2009

    Correlative or Multi-Modal Microscopy

    Correlative microscopy enables relocating regions of interest (ROI) in specimens in an electron microscope, which were previously identified in a light microscope and vice versa. The entire process takes only a few seconds. This opens up totally new dimensions in microscopy e.g., identification of ROIs with light microscopy and subsequent analytics in the SEM.

  • 2010
    2010

    Gemini 2 |
    Double Condenser

    The upper condenser sets the beam current, the lower condenser accounts for optimum resolution by optimizing the aperture angle, enablimg high resolution at all beam currents. For a larger depth of field, the system can be switched to a different imaging mode and the convergence angle will be decreased.  

  • 2015
    2015

    Gemini 3 |
    GeminiSEM with Nano-twin Lens
    and NanoVP

    The Nanotwin objective introduces a new lens design with lower aberration coefficients. It is optimized for ultra high resolution at low kV.

  • 2018
    2018

    Machine Learning for Microscopy

    Zeiss ZEN Intellesis produces powerful machine learning segmentation of multidimensional images. It enables image segmentation and object classification without the need to code a single line.

      

  • 2023
    2023

    Gemini Optics Is Turning 30 Years 🎉

    What an anniversary!

    ⬇️

Want to see how ZEISS GeminiSEM can be used in your research facility?

Fill up the form below to speak directly with a ZEISS representative about the specific needs of your facility​.

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