ZEISS Sigma

Field Emission Scanning Electron Microscope

ZEISS Sigma Family

高画質イメージングと高度な顕微鏡解析

ZEISS Sigma 300 はコストパフォーマンスに優れています。また、ZEISS Sigma 500 ではクラス最高のEDS geometry で、簡単に高速に元素分析が可能。試料を選ばず、いつでも正確に再現性のある結果が得られます。

フレキシブルな検出、４ステップワークフロー、高度な解析

フィールドエミッションSEM（FE‐SEM）のテクノロジーに高度な解析。実績ある Gemini 電子光学系を搭載しています。
様々なオプションが選択できる検出器では、粒子、表面、ナノ構造のイメージングが可能です。また、セミオートの4ステップのワークフローで時間を節約できるため、イメージングと解析のルーチンを構成して生産性が向上します。

Highlights

Compositional mode.

Topographical mode.

_{Gain information on topography and composition in a single detector.}^{Solar cell, imaged with aBSD at 5 kV and high vacuum.}

フレキシブルな検出でクリアな画像

最新の検出テクノロジーでニーズに合わせて Sigma をカスタマイズし、試料の特性を評価
Characterize composition, crystallography and surface topography with the annular backscatter detector (aBSD). It delivers excellent low kV images under all vacuum conditions. Benefit from improved sensitivity, increased signal-to-noise ratio, and more speed.
新世代の二次電子（SE）検出器：50%以上のシグナルで画像を撮影。圧力可変モードで有効な Sigma の新しい C2D および VPSE 検出器：低真空で85%以上コントラストが向上したクリアな画像を取得

ワークフローを自動化しスピードアップ

4ステップのワークフローで Sigma の全ての機能を制御。素早いイメージングで、マルチユーザ環境でもトレーニング時間を節約
試料を俯瞰して最適なイメージング条件をセット
関心領域（ROI）を活用して複数の試料を自動イメージング
ワークフローの最後のステップで試料の情報を可視化

Speed up X-ray analyses with best-in-class EDS geometry.

顕微鏡による高度な解析

走査型電子顕微鏡と元素分析を統合： Sigma のクラス最高のEDS geometry は、ビーム感受性の高い試料に対して特に分析の生産性を向上
解析データを従来の半分のプローブ電流、半分の時間で取得
完璧でムラの無い解析をするFE-SEM。完璧でムラの無い解析をするFE-SEM解析の作動距離は8.5 mmと短く、作動角度は35°

Technology

Schematic cross section of Gemini 1 optical column.

実績あるGeminiテクノロジー

Gemini の対物レンズ設計は、静電場と磁場の組合わせで、試料に与える場の影響を最小に抑えつつ、光学性能を最大限引き出すことにより、磁性材料などの難しい試料での優れたイメージングが可能
Gemini インレンズ検出は二次電子（SE）と後方散乱電子（BSE）を検出することで、最短かつ効率的なシグナル検出が可能
Gemini のビームブースターテクノロジーが小さいプローブと高いS/N比を保証

Schematic cross-section of Gemini 1 optical column with detectors.

フレキシブルな検出でクリアな画像

最新の検出テクノロジーであらゆる試料を分析
高真空モードのためのETSEおよびインレンズ検出器により、表面形状の情報を高分解能で取得
VPSEあるいはC2D検出器により、圧力可変モードで高コントラスト画像を取得
aSTEM 検出器で高分解能の透過像を取得
Investigate composition and topography with the aBSD detector.
Align the aperture fast and easy with the new auto-wobble.

Applications

Materials Science

Reveal high surface detail in surface defect inspection of non-conductive microlenses, even at 300 V, with the ETSE detector.

Fibers with embedded silver nanoparticles, from antimicrobial dressings in wound care. 1 kV, left: Inlens Duo SE, right: Inlens Duo BSE, image width 90 µm

Lanthanum carbonate is a phosphate binder used as an oral therapeutic agent for dialysis patients, imaged at 1 kV with Inlens Duo BSE.

Platinum grains showing grain boundary slip planes, imaged at 4 kV with AsB detector, image width 69 µm.

CVD-grown MoS2 2D crystals on Si/SiO2 substrate: The RISE image demonstrates wrinkles and overlapping parts of the MoS2 crystals (green), multilayers (blue) and single layers (red), image width 32 µm.

CVD-grown MoS<sub>2</sub><br /> 2D crystals on Si/SiO2 substrate: The RISE image demonstrates wrinkles and overlapping parts of the MoS2 crystals (green), multilayers (blue) and single layers (red), image width 32 µm.

Polymer mixture of polystyrene (PS) and polymethyl methacrylate (PMMA): These two polymers form an immiscible blend. The domain structures are clearly imaged where PS is blue and PMMA is red, image width 288 µm.

Life Sciences

The delicate open structure of a radiolarian is imaged effortlessly by the ETSE detector at 1 kV under high vacuum , image width 183 µm.

Mushroom spores imaged at 1 kV at high vacuum. These delicate, fragile structures can be imaged easily with Sigma 500 at low voltage.

Pearl surface: This RISE image overlaid on a SEM image makes it possible to differentiate between aragonite and vaterite phases, image width 154 µm . Both are CaCO3 polymorphs that are present in milky pearls.

They have the same chemical compositions, but different crystal structures (Raman spectrum, right). Aragonite (blue) and vaterite (red) can be clearly differentiated by means of Raman spectra.

Geosciences & Natural Resources

Rock sample imaged with the YAG-BSD which delivers images at high speeds due to the performance in light conducting of the YAG crystal, imaged at 20 kV.

Nickel sulphide ore. Mineralogic mineral EDS map.

Iron Mineralogy: Raman identification of iron ore minerals ((RISE/SEM image overlaid, image width 66 µm).

Differences in the spectra of hematite are attributed to the different orientations of the crystals (Raman spectrum, right: hematite is red, blue, green, orange and pink; goethite is light blue).

Industrial Applications

Non-conductive titanium dioxide nanoparticles used as pigments and opacifying agents can be imaged easily at 40 Pa in VP mode with the C2D, image width 10 µm.

25 – 50 nm iron oxide particles imaged with the aSTEM detector in darkfield mode at 20 kV.

Superconductor alloy sample imaged at 1 kV with the aBSD. (Scalebar 20 µm)

Accessories

SmartEDX

Discover Embedded Energy Dispersive X-ray Spectroscopy Analysis

If SEM imaging alone isn’t enough to gain a complete understanding of your samples turn to embedded EDS for microanalysis in the SEM. Acquire spatially resolved elemental chemistry information with a solution optimized for low voltage applications.

Optimization for routine microanalysis applications and detection of low energy X-rays from light elements thanks to superior transmissivity of the silicon nitride window
Workflow-guided graphical user interface improves ease-of-use and repeatability in multi-user environments
Total service and system support by a ZEISS engineer is giving you a one-stop-shop for installation, preventive maintenance and warranty

Raman Imaging and Scanning Electron Microscopy

Reap the Benefits of Fully Integrated RISE

Complement the characterization of your material and add Raman Spectroscopic Imaging. Get a chemical fingerprint from your sample and extend your ZEISS Sigma 300 with confocal Raman imaging capability.

Recognize molecular and crystallographic information
Perform 3D analysis and correlate SEM imaging, with Raman mapping and EDS data if appropriate
Fully integrated RISE lets you take advantage of both best-in-class SEM and Raman systems

Software

ZEISS SmartSEM Touch - Get more Hands on Deck

SmartSEM Touch, an add-on to the established operation system, is a simplified user-interface for multi-user environments. It comes with easy operation for both experienced and novice users. Depending on the actual laboratory environment, operation of the SEM can be the exclusive domain of expert electron microscopists. But this situation is challenged by the very common necessity that non-expert users, such as students, trainees, or quality engineers, also require data from the SEM. Sigma 300 and Sigma 300 VP take both requirements into account, with user interface options that cater to the operational needs of experienced microscopists as well as non-microscopists.

ZEISS Atlas 5 – Master Your Multi-scale Challenge

Atlas 5 makes your life easier: create comprehensive multi-scale, multi-modal images with a sample-centric correlative environment. Atlas 5 is the powerful yet intuitive hardware and software package that extends the capacity of your scanning electron microscope.

3D Surface Modelling – 3DSM

Your scanning electron microscope measures and analyzes all kinds of samples in 2D: to analyze the surfaces of samples in 3D, use 3DSM, the optional software package from ZEISS. Get topographical information by reconstructing a complete 3D model of your sample’s surface using the signals of backscatter detectors.

Visualization and Analysis Software

ZEISS recommends Dragonfly Pro from Object Research Systems (ORS)
An advanced analysis and visualization software solution for your 3D data acquired by a variety of technologies including X-ray, FIB-SEM, SEM and helium ion microscopy.

Available exclusively through ZEISS, ORS Dragonfly Pro offers an intuitive, complete, and customizable toolkit for visualization and analysis of large 3D grayscale data. Dragonfly Pro allows for navigation, annotation, creation of media files, including video production, of your 3D data. Perform image processing, segmentation, and object analysis to quantify your results.